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nanoelectromechanical systems
Nanoelectromechanical systems (NEMS) are a class of devices integrating electrical and mechanical functionality on the nanoscale. NEMS form the logical next miniaturization step from so-called microelectromechanical systems, or MEMS devices. NEMS typically integrate transistor-like nanoelectronics with mechanical actuators, pumps, or motors, and may thereby form physical, biological, and chemical sensors. The name derives from typical device dimensions in the nanometer range, leading to low mass, high mechanical resonance frequencies, potentially large quantum mechanical effects such as zero point motion, and a high surface-to-volume ratio useful for surface-based sensing mechanisms. Uses include accelerometers, or detectors of chemical substances in the air.
==Overview==
Because of the scale on which they can function, NEMS are expected to significantly impact many areas of technology and science and eventually replace MEMS. As noted by Richard Feynman in his famous talk in 1959, "There's Plenty of Room at the Bottom," there are a lot of potential applications of machines at smaller and smaller sizes; by building and controlling devices at smaller scales, all technology benefits. Among the expected benefits include greater efficiencies and reduced size, decreased power consumption and lower costs of production in electromechanical systems.〔
In 2000, the first very-large-scale integration (VLSI) NEMS device was demonstrated by researchers from IBM. Its premise was an array of AFM tips which can heat/sense a deformable substrate in order to function as a memory device. Further devices have been described by Stefan de Haan. In 2007, the International Technical Roadmap for Semiconductors (ITRS)〔(ITRS Home ). Itrs.net. Retrieved on 2012-11-24.〕 contains NEMS Memory as a new entry for the Emerging Research Devices section.
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